Department of Commerce, Mountain Administrative Support Center, Acqusition Management Division, MC3, 325 Broadway, Boulder, Co 80303-3328

36 -- OPTICAL PATTERN GENERATOR SOL 52RANB00C026 DUE 082300 POC Doug Hargrove, 303.497.3657 E-MAIL: Contracting Officer (note: do not assume that, once, douglas.hargrove@noaa.gov. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented by additional information included in this notice and in accordance with the simplified acquisition procedures authorized in FAR Part 13. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will NOT be issued. The solicitation number is 52RANB00C026 and is issued as a request for proposals (RFP). Any amendment(s) hereto will only be published in the Commerce Business Daily. The National Institute of Standards and Technology (NIST) requires an Optical Pattern Generator (OPG or System) (Item OOO1) for fabrication of master reticle masks. This System will be used to fabricate photolithographic master masks for a group of approximately 50 research scientists who typically create 400 masks per year. The System shall be easy to learn and use by multiple users who are not primary operators, easy to maintain, and highly reliable. The System at a minimum shall produce feature sizes on the plate of 1.25 microns or less, with placement accuracy and reproducibility of +/-0.25 microns or better over at least a 150 mm x 150 mm (6 inch x 6 inch) area. Detailed specifications are as follows: The stage shall be able to position features with an accuracy of +/-0.25 microns and a repeatability of 0.25 microns over the full stage motion. Stage motion shall be orthogonal to 90 degrees +/-2 arc seconds. Stage speed, which is important for minimizing exposure time, shall be 100 mm/sec (4 inches/sec) or faster in both x and y. The stage shall accommodate square plates from 76 mm x 76 mm (3 inch x 3 inch) or less to 150 mm x 150 mm (6 inch x 6 inch) or greater. Stage travel shall be sufficient to expose a 150 mm x 150 mm (6 inch x 6 inch) area. The stage shall be able to handle masks 0.090" (2.3 mm) thick; a range of mask thickness is desirable. The ability to field-retrofit the OPG for a mask autoloader is a desirable option and may be separately described and priced if available. The minimum feature size that can be exposed at the plate shall be 1.25 microns square or less. Demonstration of minimum size will be required before and after delivery. To reduce flash counts, features as large as 2 mm square or larger shall be exposed in a single flash. The aperture accuracy shall be +/-0.25 microns over the entire aperture range, and aperture resolution shall be 0.05 microns or better. Blade orthogonality shall be 90 degrees +/- 0.05 degrees or better, and blades shall be parallel to +/- 1 arc minute or better. Rotation of the aperture image is required to allow angled boxes and arcs to be exposed faster and more accurately. Rotation accuracy shall be 0.0005 degrees or better. The OPG shall include an autofocus system. Repeatability of the autofocus shall be +/-0.3 microns or better. The exposure system shall include a high output power ultraviolet lamp, preferably 500 Watts. The System shall include dose control to ensure constant exposure per flash to within 5% over the lifetime of the lamp. Maximum and typical flashes/hour should be specified. Lamp replacement shall be a simple procedure which can be easily performed by the customer. The System shall be controlled by a "standard" computer system, preferably a PC-compatible computer; this system shall be included with the OPG. The overall system software should run under a standard commercially available windowing environment such as Microsoft Windows, and be capable of network operation. The computer system shall be complete, including monitor, keyboard, mouse, hard drives, a removable media memory device (floppy, CD ROM or other standard device), and shall be Ethernet compatible. The system shall accept as input at least one of the following computer-aided design file formats: Electromask 2000, Mann 3600, CIF, or GDSII. Input files shall be transferable to the system over the Ethernet. Software shall allow a preview of the planned exposure, including anticipated flash count and an estimate of the total write time for mask. A graphical depiction of the anticipated pattern is highly desirable. Graphical depiction of the mask progress during the actual exposure is desirable. Remote monitoring of exposure progress over Ethernet is desirable. All routine System adjustments, including calibration and alignment, shall be performed through the System software. Software for System performance checks, including software to confirm alignment of apertures and stage, shall be included. Capability to remotely monitor System functions for the purpose of diagnosing problems is desirable. Because the anticipated lifetime of this instrument is greater than 10 years, it is desirable to have the source code for the System software, to allow user-performed upgrades and modifications in the future should the company either go out of business or stop supporting this machine. Software designed to modify the input file so as to optimize the exposure pattern and minimize exposure time may be included as an optional, separately-priced package. Nonetheless, the System shall be able to function directly on the input files identified above. The System will be installed by the Contractor in a return air chase for a class 100 clean room at 325 Broadway in Boulder, Colorado. The System, including environmental chamber (if needed), should fit within an area 1.8 m deep, 3 m long and 3.4 m high (6 feet deep, 10 feet long, and 11 feet high). If the System electronics and control panel do not share the same space, they shall be in a separate movable rack mount that can be located up to 6 m (20 feet) from the unit. The clean room chase maintains temperature at 68 F +/-1 and relative humidity at 38% +/- 2.5%. Access to the OPG for loading and unloading masks will be through an opening in the clean room wall. The System shall only require utilities found typically in a clean room environment: compressed air, house vacuum, 110 V and 208 V electricity. System reliability (% up-time) is extremely important for this application. Therefore, the System shall have a proven performance and reliability record with at least 5 existing customer installations of identical or very similar Systems. Routine System maintenance, including calibration and alignment, shall be of a complexity performable by typical clean room technicians. Software for routine maintenance shall be included with the software package. Delivery from time of order shall be within 9 months, including installation. Installation of the entire System shall be included in pricing. System must be capable of being moved into the clean room through a door measuring 100 cm (40 inches) wide by 210 cm (83 inches) inches high. If the System is too large to fit through this door, minimum opening size for installation shall be included in the proposal. The System shall meet all specifications after installation in Boulder. As part of installation, System training shall be provided to at least 4 users, and System routine maintenance instruction shall be provided to at least 2 Government users. Training shall be sufficient to allow a user to reliably perform all steps needed to expose a mask starting from an acceptable input file. A description of the training shall be included in the proposal. The System shall be warrantied for a minimum of 12 months following installation and acceptance testing in Boulder. Warranty shall include parts, labor and travel to fix any problems. At a minimum, the technical proposal must contain the following information/descriptions: 1. any routine System adjustments which will NOT be controlled through the software, 2. provisions for upgrading software and any applicable pricing, 3. availability of the source code, or conditions under which the source code would be made available (if any), 4. environmental conditions required to meet performance specifications, to include temperature control, humidity control, and air cleanliness, 5. requirements for size and location of required opening in the clean room wall for mask loading. 6. contact information for at least five differentcurrent customers, 7. a complete maintenance schedule and any items requiring specialized equipment or training, 8. system test pattern file(s) for determining performance, 9. a description of, and pricing for, scheduled major System routine (preventative) maintenance (not performable by the customer), 10. a description of how unscheduled repair and maintenance is handled, including costs to the Government, 11. location and number of repair staff closest to Boulder, Colorado, 12. anticipated and maximum guaranteed response time for repair calls, 13. a typical step-by-step schedule for installation of the System, and 14. a plan for acceptance testing. In addition, an environmental chamber, preferably chilled-water cooled, may be offered as an option. Installation shall be completed no later than 9 months after Contractor's receipt of a notice of award. Delivery and installation shall be F.O.B. Destination to NIST, Building 1, Room 2130 at 325 Broadway, Boulder, Colorado 80305-3328. This solicitation and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-18 as it is effective at the date of publication of this synopsis/solicitation. Forms and clauses stipulated herein may be downloaded via the internet at the following address: http://www.masc.noaa.gov/masc/amd/prc_cont.html. Interested parties are responsible for accessing and downloading documents and forms from that (or any other) site. Firms without access to the internet may call 303.497.3221 and request that copies of the clauses, provisions, and/or forms be either mailed or faxed to them. Offers shall include a properly completed and signed Standard Form 1449. The firm-fixed-price shall include all equipment, delivery, and installation FOB Boulder, Colorado. The following provisions and clauses apply to this solicitation: FAR 52.212-1, (provision) "Instructions to Offerors -- Commercial Items" // FAR 52.212-2, (provision) "Evaluation -- Commercial Items" evaluation factors: (1) price, (2) complete system meets or exceeds specifications, (3) meets installation restrictions, (4) past performance, (5) meets maintenance and warranty requirements, (6) quality of proposal. Technical and past performance, when combined, are significantly more important than price. // FAR 52.212-3, (provision) "Offeror Representations and Certifications -- Commercial Items" (NOTE: Offerors shall include with their offers a completed copy of the provision at FAR 52.212-3.) // FAR 52.212-4, (clause) "Contract Terms and Conditions -- Commercial Items" // FAR 52.212-5, (clause) "Contract Terms and Conditions Required to Implement Statutes or Executive Orders, Commercial Items" including the following additional FAR clauses referenced in FAR 52.212-5, subparagraphs (b)(1), (5), (7), (11), (12), (13), (14), (15), (19), and (22). Award will be made to the offeror presenting the best overall value to the Government. Technical factors are significantly more important than price. Offers shall be evaluated in accordance with the Test Program procedures at FAR 13.500. For further information, please contact Doug Hargrove (303.497.3657). Offers are due at 3:00 p.m. on AUGUST 23, 2000 and shall be mailed to: BID DEPOSITORY / DOC, MASC, MC3, Acquisition Management Division / Room 33-GB506A / 325 Broadway / Boulder, CO 80305-3328. ALL Hand-carried offers must be scanned in Building 22 at 325 Broadway in Boulder, Colorado prior to being delivered to David Skaggs Research Ctr., Room 33-GB506A, 325 Broadway, Boulder, Colorado. If they are not scanned, they may be refused. E-MAILED OFFERS WILL NOT BE ACCEPTED. Posted 07/28/00 (W-SN480035). (0210)

Loren Data Corp. http://www.ld.com (SYN# 0197 20000801\36-0002.SOL)

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