National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- NANOMETER PATTERN GENERATION SYSTEM SOL 53SBNB060131 DUE 081400 POC Fred Ettehadieh, Contract Specialist, 301-975-8329, Alba Sanchez, Contracting Officer, 301-975-6308. WEB: NIST Contracts Homepage, http;//www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested and a written solicitation will not be issued. Solicitation number 53SBNB060131 is being issued as a request for quotation (RFQ) using simplified acquisition procedures. Incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 97-18. This acquisition falls under Standard Industrial Classification (SIC) Code 3825 and the related size standard is 500 employees; however, this acquisition is unrestricted. The National Institute of Standards and Technology's (NIST's) Precision Engineering Division has a requirement for a Nanometer Pattern Generation System that has to be compatible with NIST's existing scanning electron microscope (SEM), Hitachi S4700, enabling it to function as an electron beam lithograph research tool. The Contract Line Item Numbers (CLINs), quantity and unit of measure are as follows: CLIN 0001, Nanometer Pattern Generation System V 9. OIU, to include user's Manual, meeting the minimum technical requirements and specifications listed below, one (1) each; and CLIN 0002, Scanning Electron Microscope (SEM) input adapter meeting the minimum technical requirements and specifications listed below, one (1) each. The minimum requirements and specifications for CLIN 0001 are as follows: The system shall allow the user to design and store complex patterns with the use of a Computer Aided Design (CAD) program, such as DesignCAD and write the patterns with the use of the SEM. All of the following drawing elements may be used in pattern design; lines of arbitrary slope, circles, circular arcs, and arbitrary filled polygons, text, Bezier curves, cubic spline curves, and elliptical arcs may also be generated and written as series of short lines. Pattern elements that may have different exposure parameters (such as dose, exposure point spacing, microscope beam current, microscope magnification, etc.) The system shall work under Windows 2000 software running on a Pentium III 600 MHz PC; The system shall have a CAD software like DesignCAD LT that can work with DXF, GDSII, CIF, HPGL ASCII and IGES file types. Dose control as an area dose (uC/cm2), a line dose (nC/cm), or a point dose (fC) and correct point exposure; The system's features shall global stage corrections, pattern arrays, X-Y-focus, and fracturing of large patterns; High speed (up to 5 MHz) control board that generates the X and Y signals to control the electron microscope; The resolution of the X and Y DAC pattern generation shall be at least 16 bits. The system shall have correct alignment and magnification setting/correction procedures and capability; Beam blanking control circuit capable to control the built-in beam blanking unit, blanked over a user selectable time range, including a "Continuous" mode. The minimum specifications and requirements for CLIN 0002 are as follows: A SEM hardware adapter with proper connection between the Digital-to-Analog Converter (DAC) control board and the Hitachi S-4700 SEM. The SEM input relay adapter for Hitachi DBS is needed as an additional hardware part to the system making a compatible link between the SEM and the control unit. The successful offeror shall deliver CLINs 0001-0002, FOB Destination to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899; delivery time shall be consistent with industry standards but should not be later than 60 days after receipt of the order. The Government intends to award a purchase order resulting from this solicitation to the responsible, responsive, technically acceptable, and lowest priced offeror whose offer conforms to the solicitation and will be most advantageous to the Government. Quotations will be evaluated to determine offerors' (A) Technical capability to meet or exceed the Government's technical specifications; (B) Past Performance; and (C) Price. Factors (A) and (B), when combined, are more important than factor (C). The provision at 52.212-1, Instructions to Offerors-Commercial Items, applies to this acquisition. All Offerors must submit a completed copy of the provision at 52.212-3, Offeror Representations and Certifications- Commercial items with their offer, which can be down loaded from http://www.nist.gov/admin/od/contract/repcert.htm. The clause at 52.212-4, Contract Terms and Conditions-Commercial Items applies to this acquisition. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including subparagraphs (11) 52.222-21, Prohibition of Segregated Facilities; (12) 52.222-26, Equal Opportunity; (13) 52.222-35, Affirmative Action for Disabled Veterans and Veterans of the Vietnam Era; (14) 52.222-36, Affirmative Action for Workers with Disabilities; (15) 52.222-37, Employment Reports on Disabled Veterans and Veterans of the Vietnam Era; (17) (ii)52.225-3, Buy American Act-North American Free Trade Agreement -Balance of Payments Program; and, (22) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. 52.227-19, Commercial Computer Software-Restricted Rights. Year 2000 Warranty-Commercial Supply Item applies to this acquisition. The Contractor warrants that each hardware, software and firmware product delivered under this contract and listed below shall be able to accurately process date data (including, but not limited to, calculating, comparing and sequencing) from, into, and between the twentieth and twenty-first centuries, including leap year calculations, when used in accordance with the product documentation provided by the contractor, provided that all listed or unlisted products (e.g. hardware, software, firmware) used in combination with such listed products properly exchange date data with it. If the contract requires that specific listed products must perform as a system in accordance with the foregoing warranty, then that warranty shall apply to those listed products as a system. The duration of this warranty and the remedies available to the Government for breach of this warranty shall be as defined in, and subject to, the terms and limitations of the contractor's standard commercial warranty or warranties contained in this contract, provided that notwithstanding any provision to the contrary in such commercial warranty or warranties, the remedies available to the Government under this warranty shall include repair or replacement of any listed product whose non-compliance is discovered and made known to the contractor in writing within ninety (90) days after acceptance. Nothing in this warranty shall be construed to limit any rights or remedies the Government may otherwise have under this contract with respect to defects other than Year 2000 performance. The Department of Commerce Agency Level Protest Procedures Level Above The Contracting Officer applies to this acquisition and can be down loaded from http://www.nist.gov/admin/od/contract/agency.htm. All offerors shall submit the following: 1) Three (3) copies of quotation which addresses CLINs 0001-0002; 2) Technical description and/or product literature including: (a) complete and detailed documentation for all hardware, software, and instructions for the use of the software, and, (b) instructions on setting up and running a SEM for writing pattern, (c) instructions on calibrating pattern size, sample patterns, and running parameters; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list; 5) A list of two (2) contracts/purchase orders completed during the past three (3) years for similar equipment with the following information: name of contracting activity, contract number, contract type, total contract value, contracting office and telephone number, e-mail address and program manager and telephone number; 6) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Item, see web site above; and, 7) Description of Software License Agreement, if applicable; "This is to advise you that if you intend to propose a software licensing agreement, it must comport with applicable Federal laws, regulations and otherwise satisfy the Government's needs". All offers should be sent to the National Institute of Standard and Technology, Acquisition and Assistance Division, Attn.: Fred Ettehadieh, 100 Bureau Drive, Stop 3572, Building 301, Room B117, Gaithersburg, MD 20899-3572. For information, call the POC identified above. Submission must be received by 3:00 p.m. local time on 8/14/2000. Faxed offers will not be accepted. Posted 08/01/00 (W-SN480710). (0214)

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