J -- ONE YEAR MAINTENANCE, I-LINE STEPPER, MODEL XLS-7300

Notice Date

December 4, 2000

Contracting Office

Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

ZIP Code

92152-5112

Solicitation Number

N66001-01-Q-0154

Response Due

December 29, 2000

Point of Contact

Purchasing Agent, Angela King, D212, (619)553-5829. Contracting Officer, Sylvia Proffit, D211, (619)553-3292.

Description

This is a combined synopsis/solicitation prepared in accordance with FAR Part 13. No hard copy Request for Quote (RFQ) will be prepared or made available for distribution. Award will be based on responsive, responsible, technically acceptable low bids. The government intends to award, on a sole source basis, a maintenance contract to Ultratech Stepper in accordance with the following Statement of Work (SOW). STATEMENT OF WORK; INTRODUCTION: The purpose of this contract is to provide routine preventive maintenance and emergency repairs as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC-SD). The stepper is a complex electromechanical optical system that is used to produce patterns on silicon wafers for the manufacture of electronic devices and integrated circuits. It utilizes several light sources each with specific purposes and includes mercury arc lamps and lasers. The critical elements of the stepper are enclosed in a chamber where temperature and humidity are carefully controlled. The sensitive electromechanical system provides precise alignment, rotation, focus, and exposure to produce circuit elements that are 0.5 microns or smaller and place them within 0.1 micron of the intended location relative to as many as 15 underlying patterns. Proper operation including precise imaging and positioning requires frequent attention by highly trained service engineers. Rapid response is required in the case of system failure because the stepper is the critical element in a process flow that requires the use of the stepper as much as twenty times as much as any other equipment in the manufacture of a typical product. If the stepper stops working, the fabrication work is halted. SCOPE: The purpose of this contract is to provide for the routine preventive maintenance and emergency repair as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC-SD). TECHNICAL REQUIREMENTS: Contractor shall: Schedule and perform on-site routine preventive maintenance (PM) of the stepper once every month during the contract period. A PM will include: Clean and lubricate of all mechanical systems. Install and do proper uniformity adjustment of mercury arc lamps. Check, record, and correct for registration overlay errors. Back up system constants and job setup data to tape. Check ACS conditions and run Setup All to determine Focus, Mag, Rot, X-trap, and Y-trap and adjust as needed. Check WH and chamber conditions and adjust as needed. Replace AWA, UDFAS, and auto focus illuminator lamps as needed and check related operations for possible adjustment. Adjust if needed. Check handler operation and RMS barcode and aligner retries. Check RMS voltages. Place a field service engineer on site within twenty-four (24) hours of notification of a functional failure that requires emergency service as determined by ICFF personnel. Provide technical support via telephone. Provide PM, technical support, application support, and emergency services during the period from 8:00 am to 5:00 pm on Monday through Friday excluding holidays. The contractor and the ICFF personnel depending upon circumstances and in the best interests of the operation of the stepper may mutually agree upon exceptions. Provide all parts for the performance of the maintenance and repair of the stepper excluding the projection lens and the following consumables which will be provided by the SSC-SD ICFF if required: Mercury arc lamps, O-rings, printer parts or materials, test reticules, floppy disks, autoloader belts, filters, and fuses. CONTRACT PERIOD: 01 FEB 01 through 02 JAN 31. TECHNICAL REPRESENTATIVES: Mark Roser, Code D876, (619) 553-1554, Fabrication Manager and Charley Young, Code D876, (619) 553-3890, Lead Engineer Photolithography. Security: Work performed on this task will be unclassified. Place of Performance: SPAWAR Systems Center San Diego, Bldg 560N. Facsimile quotations may be sent to (619)553-1062 or 4842. Questions may be directed to Angela King (619)553-5829, email: kinga@spawar.navy.mil. Note 22 applies, however, all offers received within 15 days (in lieu of 45 days) after date of publication of this synopsis will be considered by the government. See numbered notes from any Monday edition of the CBD. The applicable NAICS Code/Size Standard is: 811212/$18.0. Note: Full text of the Federal Acquisition Regulation (FAR) can be accessed on-line at http://farsite.hill.af.mil. Offerors must complete and submit with their quote, a copy of FAR 52.219-1 Alt. I/II. Central Contractor Registration is required for resulting award. Information may be found at http://www.ccr2000.com

Record

Loren Data Corp. 20001206/JSOL007.HTM (W-339 SN508011)