J -- ONE YEAR MAINTENANCE, I-LINE STEPPER, MODEL XLS-7300

Notice Date

December 20, 2000

Contracting Office

Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

ZIP Code

92152-5112

Solicitation Number

N66001-01-Q-0154

Response Due

December 29, 2000

Point of Contact

Purchasing agent, Melissa Dolan, D212, (619)553-6336

Description

The above solicitation number originally published on Dec. 4 is modified to change the POC Purchasing Agent to read as shown above, and also to replace Statement of Work with the following: INTRODUCTION: The purpose of this contract is to provide routine preventive maintenance and emergency repairs as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC SD). The stepper is a complex electromechanical optical system that is used to produce patterns on silicon wafers for the manufacture of electronic devices and integrated circuits. It utilizes several light sources each with specific purposes and includes mercury arc lamps and lasers. The critical elements of the stepper are enclosed in a chamber where temperature and humidity are carefully controlled. The sensitive electromechanical system provides precise alignment, rotation, focus, and exposure to produce circuit elements that are 0.5 microns or smaller and place them within 0.1 micron of the intended location relative to as many as 15 underlying patterns. Proper operation including precise imaging and positioning requires frequent attention by highly trained service engineers. Rapid response is required in the case of system failure because the stepper is the critical element in a process flow that requires the use of the stepper as much as twenty times as much as any other equipment in the manufacture of a typical product. If the stepper stops working, the fabrication work is halted. SCOPE: The purpose of this contract is to provide for the routine preventive maintenance and emergency repair as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC SD). TECHNICAL REQUIREMENTS: Contractor shall: Schedule and perform on-site routine preventive maintenance (PM) of the stepper once every month during the contract period. A PM will include: Clean and lubricate of all mechanical systems. Install and do proper uniformity adjustment of mercury arc lamps. Check, record, and correct for registration overlay errors. Back up system constants and job setup data to tape. Place a field service engineer on site within twenty-four (24) hours of notification of a functional failure that requires emergency service as determined by ICFF personnel. Provide technical support via telephone. Provide PM, technical support, application support, and emergency services during the period from 8:00 am to 5:00 pm on Monday through Friday excluding holidays. The contractor and the ICFF personnel depending upon circumstances and in the best interests of the operation of the stepper may mutually agree upon exceptions. Provide all parts for the performance of the maintenance and repair of the stepper excluding the projection lens and the following consumables which will be provided by the SSC SD ICFF if required: Mercury arc lamps, O-rings, printer parts or materials, test reticules, floppy disks, autoloader belts, filters, and fuses. CONTRACT PERIOD: Anticipated to be twelve (12) months from the date of award. TECHNICAL REPRESENTATIVES: Mark Roser, Code D876, (619) 553-1554, Fabrication Manager, Charley Young, Code D876, (619) 553-3890, Lead Engineer Photolithography. Security: Work performed on this task will be unclassified. Place of Performance: SPAWARSYSCEN, San Diego, Bldg 560N.

Record

Loren Data Corp. 20001222/JSOL001.HTM (W-355 SN5093P2)