Loren Data Corp.

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COMMERCE BUSINESS DAILY ISSUE OF MARCH 12, 2001 PSA #2805
SOLICITATIONS

66 -- XENON DIFLUORIDE ETCH SYSTEM

Notice Date
March 8, 2001
Contracting Office
US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197
ZIP Code
20783-1197
Solicitation Number
W71B7J-1046-M181
Response Due
March 26, 2001
Point of Contact
Robert M. Tomko,(301)-394-3691
Description
. Xenon diflouride etch system for performing isotropic silicon etching on micro-electromechanical system devices having critical dimensions from 2 microns to 1000 microns. System must be computer controlled to enable precise process control. Contractor training, installation and full performance demonstration required at Adelphi, MD. Three-year parts, labor and software upgrade warranty required. The government intends to award this requirement on a sole source basis to XACTIC, Inc., Pittsburgh, PA. All responsible sources may submit a capability statement to Robert Tomko by facsimile (301-394-1891) or email to rtomko@arl.army.mil. All responses will be considered.
Record
Loren Data Corp. 20010312/66SOL006.HTM (W-067 SN50F6V4)

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Created on March 8, 2001 by Loren Data Corp. -- info@ld.com