66 -- XENON DIFLUORIDE ETCH SYSTEM

Notice Date

March 8, 2001

Contracting Office

US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

ZIP Code

20783-1197

Solicitation Number

W71B7J-1046-M181

Response Due

March 26, 2001

Point of Contact

Robert M. Tomko,(301)-394-3691

Description

. Xenon diflouride etch system for performing isotropic silicon etching on micro-electromechanical system devices having critical dimensions from 2 microns to 1000 microns. System must be computer controlled to enable precise process control. Contractor training, installation and full performance demonstration required at Adelphi, MD. Three-year parts, labor and software upgrade warranty required. The government intends to award this requirement on a sole source basis to XACTIC, Inc., Pittsburgh, PA. All responsible sources may submit a capability statement to Robert Tomko by facsimile (301-394-1891) or email to rtomko@arl.army.mil. All responses will be considered.

Record

Loren Data Corp. 20010312/66SOL006.HTM (W-067 SN50F6V4)