COMMERCE BUSINESS DAILY ISSUE OF MARCH 12, 2001 PSA #2805
SOLICITATIONS
66 -- XENON DIFLUORIDE ETCH SYSTEM
- Notice Date
- March 8, 2001
- Contracting Office
- US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W71B7J-1046-M181
- Response Due
- March 26, 2001
- Point of Contact
- Robert M. Tomko,(301)-394-3691
- Description
- . Xenon diflouride etch system for performing isotropic silicon etching on micro-electromechanical system devices having critical dimensions from 2 microns to 1000 microns. System must be computer controlled to enable precise process control. Contractor training, installation and full performance demonstration required at Adelphi, MD. Three-year parts, labor and software upgrade warranty required. The government intends to award this requirement on a sole source basis to XACTIC, Inc., Pittsburgh, PA. All responsible sources may submit a capability statement to Robert Tomko by facsimile (301-394-1891) or email to rtomko@arl.army.mil. All responses will be considered.
- Record
- Loren Data Corp. 20010312/66SOL006.HTM (W-067 SN50F6V4)
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