66 -- OPTICAL INTERFEROMETER SYSTEM

Notice Date

April 13, 2001

Contracting Office

NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135

ZIP Code

44135

Solicitation Number

RFO3-172680

Response Due

April 26, 2001

Point of Contact

Ronald L. Matthews, Contract Specialist, Phone (216) 433-2766, Fax (216) 433-2480, Email Ronald.L.Matthews@grc.nasa.gov

E-Mail Address

Ronald L. Matthews (Ronald.L.Matthews@grc.nasa.gov)

Description

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). The Glenn Research Center is issuing this solicitation for 1 each, Optical Interferometer System. The system shall be in accordance with the following specifications: The optical interferometer is a measuring instrument used to measure surface texture and surface profiles for materials, microelectronics and micromechanical Systems (MEMS) fabrication. The following is a description of specifications and features that the optical interferometer shall possess. The Optical Interferometer shall meet the following specifications: 1. Shall have a 1 E (Angstrom) or better scanning resolution over a 30 5m continuous scan. 2. System shall incorporate Frequency Domain Analysis (FDA) and Phase Analysis. 3. System shall maintain a 1nm or better measurement stability over 8 hours. 4. System shall have 0.1% or better step height measurement repeatability on a NIST calibration standard between 1.5 and 2.5 5m and on a standard between 25 and 505m. 5. Shall be a non-contact, three-dimensional scanning system. 6. Vertical scan range shall be 150 5m or better. 7. Vertical resolution shall be 0.1 nm or better. 8. Lateral resolution shall be 1 mm or better with the correct objective lens. 9. Data scan rate shall be 10.5 5m/sec or better. The optical interferometer shall be a complete system with all components required to meet all specifications integrated together. Besides the general specifications listed in 1 through 9, the system shall also incorporate: 7 The optical interferometer stage shall have a X, Y, Z stage plus X-Y tip/tilt axis motorized stage with separate 5-axis controller box. The controller shall have multi control pendants, joysticks, or similar user interface. The stage shall be computer controlled for stitching application. (Stitching is the creation of a composite image from many images taken over a smaller field of view). 7 The optical interferometer microscope shall include as a minimum the following: Objectives: 5x and 50x. Note the total usable space from the stage to the objective must be 2 inches or better. Image Zoom: Continuous variable zoom from 0.5 to 2.0 or better. Field of View: 0.1 mm to 15 mm or better. Optical focus. 7 Digital camera shall have multiple resolutions ranging between 160 x 120 to 640 x 480 or better. 7 Vibration Isolation Table to support optical interferometer camera and telescope. 7 Calibration Standards: NIST step height and lateral calibration standards shall be provided. 7 System shall be computer controlled and data taken and stored electronically. PC shall be Pentium-based processor running under Windows NT or Windows and include at a minimum, a hard drive, CD-RW or Zip disk, floppy drive, 19-inch color monitor, and color printer. Computer shall be integrated into system. 7 Furniture shall be provided that will house the PC, monitor, printer and stage controllers. 7 Software package shall be able to run with Windows NT or Windows. The software package shall have an interactive window display that can simultaneously present on-screen instrument control, high resolution 3-D images and 3-D plots (including isometric, contour, and histograms), multiple 2-D and 3-D data windows, and a wide range of surface roughness parameters. Stitching shall be automatic or computer controlled. The manufacture shall provide a complete set of operating manuals and detailed schematics for the optical interferometer and all of its components. The manufacture will deliver and setup Optical Interferometer. Manufacture shall provide a technician/scientist to NASA Glenn Research Center for a minimum of one day, to assure the Optical Interferometer is properly set up, and to train NASA technicians on the operation of the Optical Interferometer. One scheduled 3-day class will be provided at designated location for one technician/scientist from NASA Glenn Research Center by manufacture (excluding travel cost). Manufacture must provide an UNLIMITED ONE-YEAR WARRENTY on all parts and services. The provisions and clauses in the RFQ are those in effect through FAC 97-21. The NAICS Code and the small business size standard for this procurement are 333314 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to GRC is required within 60 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by 4/26/01, 4:30pm EST. and may be mailed NASA-GRC, Attn: Ronald L. Matthews, MS 500-306, 21000 Brookpark Rd., Cleveland, OH 44135 and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. Addenda to FAR 52.212-1 are as follows: [DELETE IF NO ADDENDA]. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Selection and award will be made to the lowest priced, technically acceptable quoter. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See NASA Specific Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin=22 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). See Note(s) N/A. Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html

Web Link

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Record

Loren Data Corp. 20010417/66SOL012.HTM (D-103 SN50J269)