59 -- MASK/BOND ALIGNER TOOL SYSTEM

Notice Date

April 16, 2001

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Assistance Division, Room B128, Building 301, Gaithersburg, MD, 20899

ZIP Code

20899

Solicitation Number

01-812-4122

Response Due

April 30, 2001

Point of Contact

Tamara Grinspon, Contract Specialist, Phone (301) 975-4390, Fax (301) 963-7732, Email tamara.grinspon@nist.gov -- Paul Cataldo, Contract Specialist, Phone (301) 975-6332, Fax (301) 963-7732, Email

E-Mail Address

Tamara Grinspon (tamara.grinspon@nist.gov)

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-, AND FAR SUBPART 13.5-TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS, AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED.*****This solicitation, #01-812-4122, is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-22.*****The associated North American Industry Classification System (NAICS) code for this procurement is 333295, and the small business size is 500 Employees.*****The National Institute of Standards and Technology (NIST) has a requirement for Mask/Bond Aligner Tool System, Karl Suss Brand Name (Karl Suss Parts MA6/BA6; Chuck MA5/BA6/Vac/W-2; Chuck MA6/BA6/Vac6mm x 6mm up to 25mm; MA6/BA6/BI/M-2.5-7/W-2; 10 x OBJ w/offset Adapter (quantity 2); Light Intensity Meter; 1-Channel Light Sensor 365nm; 1-Channel Light Sensor 405 nm; and Lamp Upgrade from 350 w to 1000w) OR EQUAL, which will be used at the NIST Microfabrication Process Facility in the Semiconductor Electronics Division to provide NIST with a high quality photolithographic system with the broadest degree of flexibility available. The tool will be used in a multi-user semiconductor research environment that is setup to accommodate a variety of research projects and is subject to frequently changing research directions.*****Quotations shall include a one-year warranty for the system on parts and labor, plus installation at NIST, Gaithersburg, MD.*****Salient characteristics of the Karl Suss system are: (a) capability to process a wide range of semiconductor technologies including, but not limited to, Back Side Alignment (BSA) for lithographic exposure for 4" substrates utilizing a dual CCD camera optical pattern storage system for alignment application (this will permit the Molecular Electronics and also the MEMS researchers to define features on the backside of a wafer and have them in alignment with the critical features that were defined into the front side of the wafer; (b) ability to provide an offset microscope objectives allowing separation as small as 8 mm or able to view wafer flat for accurate crystal-plane orientation; (c) ability to provide the flexibility to do lithographic exposures on the following sizes of substrates: 6mm to 25mm pieces, 2"-6" substrates and their coinciding standard mask sizes; (d) provide quick mask holder and chuck changeover with tools for different substrate sizes; (e) have Class 100 clean room compatibility; (f) ability to provide capability for wafer-to-wafer bond alignment; (g) ability to provide a high power UV (1000 Watt) illumination exposure source; (h) capability to provide minimum resolution features in the sub-micron dimension (0.75 micron or less); (i) have full field exposure of up to 6" x 6"; (j) ability to provide an anti-vibration support table for high-resolution lithographic applications; (k) ability to provide proximity, hard and soft contact lithography; (l) have electrical requirements of 230V/60Hz; (m) capability to be easily upgraded for future work doing wafer-to-wafer bond alignments without the need for new tooling, at a reasonable cost, plus ability to handle other future research compatible upgrades.*****Delivery is required within 40 weeks after receipt of purchase order (ARO).*****The FOB point shall be DESTINATION, Gaithersburg, MD.*****Quotations will be evaluated in accordance with Federal Acquisition Regulation (FAR) Subpart 13.106-2-Evaluation of quotations or offers. Award will be made based on vendors' (A) Technical Capability to Meet Specifications (vendors shall address all specifications, and shall provide indication of understanding and ability to meet requirements); (B) Past Performance/Experience (vendors shall provide four (3) references to whom comparable systems preferably for similar applications -- have been sold over the past five (5) years, including organization name, point of contact, phone number, and fax number for each); and (C) Price. (A) and (B), when combined, are more important than (C).*****The Government anticipates awarding one purchase order resulting from this combined synopsis/solicitation to the responsible vendor whose quotation, conforming to this synopsis/solicitation, will offer the BEST VALUE to the Government, price and other factors considered.*****Vendors shall address all requirements in this combined synopsis/solicitation, and shall provide clear evidence of understanding and the ability and willingness to comply with the Government's specifications of need. Failure to address a specification/requirement will be construed by the Government as inability to meet the need, or the vendor's taking exception to it.*****All vendors are to include with their quotes, a completed copy of provision 52.212-3, Offeror Representations and Certifications-Commercial Items, which may be downloaded from www.arnet.gov .*****The following Federal Acquisition Regulation (FAR) provision applies to this solicitation: 52.212-1, Instructions to Offerors-Commercial; ***** The clause at 52.212-4, Contract Terms and Conditions-Commercial Items, applies to this acquisition.*****The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including subparagraphs (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns; (5) 52.219-8, Utilization of Small Business Concerns; (8)(i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns; (11) 52.222-21, Prohibition of Segregated Facilities; (12) 52.222-26, Equal Opportunity; (13) 52.222-35, Affirmative Action for Disabled Veterans and Veterans of the Vietnam Era; (14) 52.222-36, Affirmative Action for Workers with Disabilities; (15) 52.222-37, Employment Reports on Disabled Veterans and Veterans of the Vietnam Era; (19) 52.225-5, Trade Agreements; (22) 52.225-15, Sanctioned European Union Country End Products; (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration.; and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded at http://oamweb.osec.doc.gov/conops/reflib/alp1296.htm All interested, responsible small business firms should submit quotes (Original Plus One Copy Of Quote and Enclosures), by 3:00 PM, Washington DC time, on APRIL 30, 2001, to the National Institute of Standards and Technology, Acquisition and Logistics Division, ATTN: TAMARA GRINSPON (01-812-4122), Building 301, Room B129, 100 Bureau Drive STOP 3571, Gaithersburg, Maryland 20899-3571. Faxed quotes will NOT be accepted. Copies of above-referenced clauses are available upon request.

Web Link

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Record

Loren Data Corp. 20010418/59SOL004.HTM (D-106 SN50J3F7)