28 -- QUARTZ BARREL PLASMA SYSTEM

Notice Date

May 30, 2001

Contracting Office

US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

ZIP Code

20783-1197

Solicitation Number

W71B7J-1067-M181

Response Due

June 1, 2001

Point of Contact

Kathy Brown, Contract Specialist, 301-394-4012 Contracting Officer, Bob Tomko, 301-394-3691

Description

The Army Research Laboratory is soliciting on a brand name or equal basis for a Quartz Barrel Plasma System. The brand name product is a Quartz Barrel Plasma System, Part Number MP600, manufactured by Anetech Ltd, 247 Central Street, Winchendon, MA 01475. The salient characteristics are: (1) 10" I.D. x 18" I.L. quartz chamber. (2) Solid state R.F. supply, 0-600 watts @ 13.56MHZ with Automatic impedance matching. (3) Inductively coupled plasma system for isoptropic etching. (4) One temperature controlled (0 to 100 C) shelf to be located in the bottom of the chamber positioned such that the use of 6-inch wafers supported in a boat can still be processed. (5) Recirculator heater and chiller for heating/cooling the shelf. (6) Provide two mass flow controllers, 0-1000 sccm, one for oxygen, one for CF4 (carbon tetrafloride). (7) Capable of storing multiple on board recipes( nineteen). (8) PLC (microprocessor) control allowing fully automatic operations. (9) Easily viewed digital displays showing power, pressure, time and all MFC gas flows. (10) Greater than or equal to 23 CFM vacuum pump prepared to use with oxygen. (11) Nitrogen backfill. (12) Slow pump particle reduction capability. (13) Effluent free system containing no CFCs that is operator and environmentally safe. To request a copy of the solicitation package send a request to rmac-adelphi@arl.army.mil with "Brown -- W71B7J-1067-M181" in the subject line. No telephone request will be honored. See Numbered Notes: 1 and 22

Record

Loren Data Corp. 20010601/28SOL010.HTM (W-150 SN50N3W0)