66 -- ROTATING 2 INCH SUBSTRATE HEATER

Notice Date

May 30, 2001

Contracting Office

DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway, MC3; Boulder, CO

ZIP Code

00000

Solicitation Number

NB814-4089DT

Response Due

June 18, 2001

Point of Contact

Doris Turner, Purchasing Agent, 303-497-3872 or FAX:303-497-3163

E-Mail Address

NOAA; MASC Acquisition Management (Doris.P.Turner@noaa.gov)

Description

The National Institute of Standards and Technology (NIST) requires a Rotating 2 inch substrate heater for a vacuum deposition system to allow for double-sided, high-temperature deposition of oxide thin films on 2 inch diameter substrates. The following specifications must be met: 1) Heater must accommodate 2 inch substrates in a manner that allows for double-sided film deposition by pulsed laser deposition, with temperature uniformity at least plus or minus 5 degrees C across the heater plate; 2) Must heat to at least 950 degrees C in ambient oxygen, and include necessary power supplies for 110V operation; 3) Must be compatible with UHV environment; 4) Must control temperature to plus or minus 1 degree C, and include necessary temperature controllers; 5) Must allow for substrate rotation, and include necessary motors and controllers; 6) Mounted on a 10 inch CF flange, 11.19 inch flange to substrate distance, rotation about center of substrate; 7) substrate center 0.5 inch away from flange center line; 8) substrate surface plus 18mm from flange center line; 9) Must include two additional heater plates for attachment of smaller-sized chips; 10) Must include shutter assembly; 11) Orientation: substrate perpendicular to flange surface; 12) Must fit through 7 3/4 inch port in existing deposition system. In addition, this item must be compatible with our existing system while meeting all of the requirements for PLD growth of oxide thin films (namely, high temperature in an oxygen ambient environment). Interested sources proposing to supply the specified system must submit a written qualification statement clearly establishing the capability to meet the above requirements within 15 days from the date of this synopsis. The qualification statements will be used to determine the need for competitive bids. In the absence of other qualified sources, it is the intent of the Government to negotiate a sole source contract under the authority of 41 U.S.C. 253 (c)(1) with Neocera, Inc. 10000 Virginia Manor Road, Beltsville, MD 20705. Responses are due via mail or FAX by June 18, 2001. No RFQ package is available. This procurement is being conducted per Simplified Acquisition Procedures FAR Part 13 (NTE $100,000). FAR Clauses in full text are at http://www.ARNET.gov/far Terms and conditions and agency level protest procedures are referenced at http://www.doc.gov/oam/conops/#reference Anticipated award date is June 19, 2001

Record

Loren Data Corp. 20010601/66SOL021.HTM (D-150 SN50N4C5)