36 -- SURFACE PROFILOMETER

Notice Date

June 1, 2001

Contracting Office

Army Research Laboratory, Attn: AMSSB-ACC-AA, Aberdeen Proving Ground, MD 21005-5066

ZIP Code

21005-5066

Solicitation Number

W71B7J-1095-M182

Response Due

June 16, 2001

Point of Contact

Alison Slawson, Contract Specialist, 301-394-1494, Contracting Officer: Robert Tomko, 301-394-3691

Description

The Army Research Laboratory is soliciting on a brand name or equal basis for a commercially available Surface Profilometer. The brand name product is KLA Tencor Model P-15 Surface Profilometer manufactured by KLA Tencor, Corporation, 160 Rio Robles, San Jose, California, 95134. The Salient capabilities are (1) Accurate measurement of surface film thicknesses and step heights on the surface with consistent repeatability (1s) of < 0.60nm over a + 6.5 micrometer scanning range. (2) An instrument with a stylus force that is constant to + 0.001 mg force throughout the scan and at all set stylus forces. Knowing the exact relative locations at which step heights and their profiles are measured on the MEMS devices are critical. (3) Real-Time simultaneous observations of both the substrate and the stylus in the direction of the scan during the scan. To request a copy of the solicitation package send a request to rmac-adelphi@arl.army.mil with "A. Slawson W71B7J-1095-M182" in the subject line. No telephone requests will be honored.

Record

Loren Data Corp. 20010605/36SOL001.HTM (W-152 SN50N6J3)