28 -- QUARTZ BARREL PLASMA SYSTEM

Notice Date

June 4, 2001

Contracting Office

U.S. Army, Robert Morris Acquisition Center, AMSSB-ACA-C, 2800 Powder Mill Road, Adelphi, MD 20783-1197

ZIP Code

20783-1197

Solicitation Number

DAAD17-01-T-0451

Response Due

June 15, 2001

Point of Contact

Kathy Brown, Contract Specialist, (301)394-4012, Robert Tomko, Contracting Officer (301)394-3691

Description

The previous CBD notice posted 01 June 01 is hereby amended to change the solicitation number from W71B7J-1067-M181 TO DAAD17-01-T-0451 and to change the bid opening/response date from 01 June 01 to 15 June 01. Army Research Laboratory is soliciting on a brand name or equal basis for a Quartz Barrel Plasma System and a 1 KW RF Upgrade. The brand name product is a Quartz Barrel Plasma System, Part Number MP600 manufactured by Anetech Ltd, 247 Central Street, Winchendon, MA 01475. The salient characteristics of the system are: (1) 10" I.D. x 18" I.L. quartz chamber. (2) Solid state R.F.supply,0-600 watts @ 13.56MHZ with Automatic impedance matching. (3) Inductively coupled plasma system for isoptropic etching. (4) One temperature controlled (0 to 100 C) shelf to be located in the bottom of the chamber. The shelf shall be positioned such that the use of 6-inch wafers supported in a boat can still be processed. (5) Recirculator heater and chiller for heating/cooling the shelf. (6) Provide (2) Mass flow controllers, 0-1000 sccm, one for oxygen, one for CF4 (carbon tetrafloride). (7) Capable of storing multiple on board recipes(>=nineteen). (8) PLC (microprocessor) control allowing fully automatic operations. (9) Easily viewed digital displays showing power, pressure, time and all MFC gas flows. (10) Have a greater than or equal to 23 CFM vacuum pump prepared to use with oxygen. (11) Have a Nitrogen backfill. (12) Must have slow pump particle reduction capability. (13) Provide installation and on-site operator training. (14) Must have an effluent free system containing no CFCs that is operator and environmentally safe. To request a copy of the solicitation package send a request tormac-adelphi@arl.army.mil with "Brown -- DAAD17-01-t-0451" in the subject line. No telephone request will be honored. See Numbered Notes: 1 and 22

Record

Loren Data Corp. 20010606/28SOL003.HTM (W-155 SN50N7Y2)