35 -- RADIO FREQUENCY ETCHING SYSTEM

Notice Date

June 12, 2001

Contracting Office

Army Research Laboratory, Attn: AMSSB-ACC-AA, Aberdeen Proving Ground, MD 21005-5066

ZIP Code

21005-5066

Solicitation Number

DAAD17-01-R-0019

Response Due

July 13, 2001

Point of Contact

Jeanine Worthington, Contract Specialist, 410-278-6514

Description

The previous CBD notice posted on 12 June 01 is hereby amended to change the bid opening/response date from 07 January 13 to 13 July 01. The US Army Research Laboratory (ARL) intends to negotiate on a sole source basis to purchase a radio frequency etching system. The system is model VLR-702, manufactured by Unaxis, 10050 16th Street North, St. Petersburgh, FL 33716. The salient characteristics are as follows: (1) The system must be compatible with, and capable of being mounted onto, a Unaxis Versalock Cluster Tool (VLR system configuration) presently in place in the Army Research Laboratory Zahl Building Laboratory Clean Room. (2) The system must utilize the same "platform", i.e., the same type of vacuum load module, the same type of primary loadlock, the same type of slot valves, and the same type of loadlock pumping as presented by the Unaxis Versalock Cluster Tool. (3) It must be completely compatible with the Versalock hardware and software. (4) The system shall be physically located at a position of 3 o'clock with respect to the present cluster tool. (5) The ICP source shall be 2 MHz, with 1000 watts power level, and the RIE source shall be 13.56 MHz, with dual power range of 60/600 watts. Interested parties may submit their interest and capabilities statement, referencing DAAD17-01-R-0019, via fax to Jeanine Worthington, 410-278-6522. SEE Note 22

Record

Loren Data Corp. 20010614/35SOL004.HTM (W-163 SN50O6J0)