66 -- PROCUREMENT OF A WAFER SURFACE CONDITIONING SYSTEM

Notice Date

June 13, 2001

Contracting Office

Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

ZIP Code

92152-5112

Solicitation Number

N66001-01-Q-1081

Response Due

June 28, 2001

Point of Contact

Roger Haag, Contract Specialist; 619-553-7734

E-Mail Address

Click here to contact the contract specialist via (rhaag@spawar.navy.mil)

Description

The Government intends to award, on a Sole-Source basis, a purchase order to FSI International for the following items: Wafer Surface Conditioning System; Description: Configured to use 150mm silicon wafers; configured for Fluoroware A190-60M-0215 low profile cassettes; configured for typical FSI "B" cleans; configured to conduct photoresist stripping; configured to conduct sidewall polymer removal; conforms to FSI's "Mercury MP Spray Processing System Machine Specifications"; contains a clean-room and level floor; must not exceed the following dimensions: back to front dimension of 45 inches, process console is no wider than 60 inches, electronics console is no wider than 36 inches; two chemical consoles; chemical consoles not to exceed the following specifications: 25 inches in width, 45 inches in depth, 36 inches in height; includes in-line IR chemical heating for all chemicals; cabinet material must be Fire Retardant Polypropylene or equivalent; includes dual canisters for H2O2; chemical inputs and flow ranges are as follows: 50:1HF-500-1800cc/min, NH4OH-30-300cc/min, HC1-30-300cc/min, H2O2-30-300cc/min, H2S04-600-800cc/min, de-ionized water mix; chemical flow streams must use Millipore filters; dual exhaust ducting; chemical feed-lines must be sufficient to allow for canister consoles to be placed 15-20 ft from process console on same level floor in chase; concentrated waste drain; chemical canisters configured for manual fill; FSI HELIOS for DI water heating with 480V 3-Phase 60Hz; FSI DI water booster pumping with 208V single-phase 60Hz; includes one HELIOS spares kit and one IR Heater spares kit; cabinet drip tray for each cabinet; component rinse valve for manual rinsing and purging; system must perform at FSI's 503289-0001 Rev. "F" specifications in order for the government to accept item; contractor must install system. Must include start up operation training on-site, maintenance and process training for two people, two sets of clean-room manuals and one software version of online documentation. Must include a three-year warranty to include parts and labor after installation. This proposed contract action is for supplies for which the Government intends to solicit and negotiate with only one source under the authority of FAR 6.302. Interested persons may identify their interest and capability to respond to the requirement. This notice of intent is not a request for competitive quotes. Interested persons shall provide specific information regarding their product's capabilities as compared to the items identified above within 15 days of this publication date. A determination by the Government not to compete this proposed purchase order based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement.

Record

Loren Data Corp. 20010615/66SOL016.HTM (W-164 SN50O8U4)