A -- VIBRATION-RESISTANT MICRON-SIZED PROFILE MONITOR

Notice Date

June 19, 2001

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571

ZIP Code

20899-3571

Description

Researchers at the National Institute of Standards and Technology (NIST) are working on the following technologies: A common-path, heterodyne laser interferometer that can provide surface profiles of micron-sized photo-masked features during the etching step of the microelectronic fabrication process has been designed. The device operates by monitoring the phase difference between reflected measurement and reference beams of lightly different frequencies. Scanning the focussed measurement beam across features of interest results in a surface of the feature depth that is accurate to within 1 nm. For further information, contact: National Institute of Standards and Technology, Office of Technology Partnerships, 100 Bureau Drive, Stop 2200, Gaithersburg, MD, 20899; This is not an announcement of a contract action or a grant.

Web Link

Visit this URL for the latest information about this (http://www.eps.gov/spg/DOC/NIST/AcAsD/NISTDOCKETNumber00-029/listing.html)

Record

Loren Data Corp. 20010621/SPMSC003.HTM (D-170 SN50P3C1)