66 -- ALPHA STEP SCANNER

Notice Date

August 15, 2001

Contracting Office

Department of the Navy, Office of Naval Research, Naval Research Laboratory/Supply, 4555 Overlook Ave S.W., Washington, DC, 20375

ZIP Code

20375

Solicitation Number

N00173-01-Q-0171

Response Due

September 12, 2001

Point of Contact

Darlene Copp, Contracting Officer, Phone 202-767-2374, Fax 202-404-8158, Email SolQnA@labmis.nrl.navy.mil

Description

Naval Research Laboratory intends to award to KLA-Tencor Corporation, on other than full and open competitive basis, 1 each Alpha Step 500 precision scanner part #250287; 1 each black and white camera, part #239720; 1 each Voltage kit, 108-130 volts, part #241474; 1 each Manual XY stage AS500, part #250325; 1 each Standard Optics 88-247X, part #056359; 1 each accessory tool kit, part #083569; 1 each step height standard, 1.8 microns, part #SHS-1.8Q; 1 each Step height standard, 180 nanometers, part #SHS-1800QC; 1 each Standard KLA-Tencor 12 month warranty; and 1 each Stylus, 0.1-0.2 micron radius, 85 degrees (SEM), part #086444. Sole source is based on unique requirements needed to meet missions critical to NRL. See note(s) 22.

Web Link

Visit this URL for the latest information about this (http://www.eps.gov/spg/USN/ONR/3400/N00173-01-Q-0171/listing.html)

Record

Loren Data Corp. 20010817/66SOL011.HTM (D-227 SN50V019)