A -- HIGH ASPECT RATIO (HAR) MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) DEVICES

Notice Date

October 30, 2001

Contracting Office

US Army ARDEC, AMSTA-AR-PC, Picatinny Arsenal, New Jersey 07806-5000

ZIP Code

07806-5000

Solicitation Number

DAAE30-02-Q-0402

Response Due

November 25, 2001

Point of Contact

Anna Yim, Contract Specialist, 973-724-4674

E-Mail Address

Anna Yim (ayim@pica.army.mil)

Description

The U.S. Army Tank-Automotive and Armaments Command, Armament research, Development and Engineering Center (TACOM-ARDEC), Picatinny Arsenal, NJ is currently seeking sources that are capable of fabricating prototype High Aspect Ratio (HAR) MEMS Devices. The devices will be used to sense aeroballistic environments (high acceleration and centrifugal forces) within a small-caliber munition. Parts, including subtrates, devices, and assemblies using microfabrication and replication materials such as SI, SIO2,metal, plastic, etc., and advanced packaging techniques, will be fabricated and fully evaluated for performance, failure modes, and applicability to DOD systems. A respondent should be able to show that they have adequate technical and fabricating capacity and good past performance in HAR MEMS manufacturing techniques, including fabrication, assembly, characterization, and packing capabilities. A broad range of micromachining processing capabilities is required including bulk, surface, wafer bonding, drie, liga and others. The respondent should be capable of flexibly using more than one HAR MEMS fabrication technology or to draw from several technologies to achieve the desired functional devices. The respondent will be required to provide mask layout designs, process rule checks and development of processes identified above. The respondent will either identify the fabrication process sequence and resource capabilities provided in-house or determine how multiple fabrications sites will be ebgaged. Experiences in final testing and packaging of MEMS devices should be desribed. The respondent must adviseof intentions to use foreign sources. Finally, the respondent must demonstrate a capability for "Quick Turnaround" of prototype quantities of parts, with the time from final approval of payout designs to delivery of prototype quantities of parts to be no longer than 120 days. Qualifications: A respondent to this market survey must have available a majority of the skills and facilities that are required to fabricate this class of item. Interested companies who feel they have the necessary capabilities should respond by providing the Government the following information; A brief summary of the company's capabilities pertaining to High-Aspect Ratio MEMS fabrication, description of existing, qualified, and operating facilities, personnel, and related fabricating experience; estimated minimum and maximum monthly production quantities. If a respondent does not have adequate resources (technical, manufacturing, personnel, etc) availble, the respondent must be able to demonstrate the ability to reliably obtain those resources in a timely fashion. If a respondent chooses to utilize the services of sub-tier vendors or subcontractors, those vendors or subcontractors must also meet these criteria. A respondent must have the capabilitity of handling classified drawings, electronic files, or hardware. Information shall be submitted within 15 calendar days from the date of this publication to: U.S. ARMY TACOM/ARDEC, Attn: Anna Yim, AMSTA-AQ-APD, Picatinny Arsenal, NJ 07806-5000. This market survey is for planning purposes only and shall not be construed as a request for proposal or as an obligation on the part of the Government. The Government does not intend to ward a contract on the basis of this market survey or otherwise pay for information solicited. The Government will utilize the information provided for planning purposes only. All information submitted will be held in a confidential status.

Web Link

US ARMY TACOM-ARDEC Procurement Network (http://procnet.pica.army.mil/cbd/SRCSgt/103020010/103020010.htm)

Record

Loren Data Corp. 20011101/ASOL012.HTM (D-303 SN5118X2)