66 -- EMISSIVITY-COMPENSATED PYROMETER

Notice Date

December 18, 2001

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 1 00 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571

ZIP Code

20899-3571

Solicitation Number

02-844-3042

Response Due

December 31, 2001

Point of Contact

Tamara Grinspon, Contract Specialist, Phone (301) 975-4390, Fax (301) 975-8884, Email tamara.grinspon@nist.gov -- Ca rol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, Email carol.wood@nist.gov

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12 .6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-, AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED.*****This solicitation, #02-844-3042, is a Request for Quotation (RFQ). The soli citation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-01, effective October 22, 2001.*****The associated North American Industry Classification System (NAICS) code for this procureme nt is 334413, and the small business size standard is 500 Employees.***** This acquisition is unrestricted and all responsib le vendors may submit a quote.*****The National Institute of Standards and Technology (NIST) has a requirement for an Emissi vity-compensated Pyrometer, EMCORE BRAND NAME -- OR EQUAL (EMCORE Part #'s 1023958 RealTempSystem, 1024312 Tilted Viewport, and 1027455 RealTemp Computer and Epistat Softward System), which will be used for developing accurate (i.e. traceable to IT S-90) and verifiable temperature metrology for the measurement of semiconductor wafers during rapid thermal processing. The pyrometer shall also be capable of providing in-situ monitoring of reflectance in a deposition process, real-time monitoring of film growth rate, and information about surface morphology.*****The following salient characteristics and specification s are required and shall be met: (1) Capable of measuring temperature, emissivity, reflectance, film growth, and characteris tics of surface morphology and performing measurements on rotating discs; (2) Operating wavelength 905 +/- 35 nm; (3) Mini mum set of compatible substrates: Si, GaAs, Ge, InP, InAs, InSb; (4) Minimum temperature measurement range: 540 ?C to 900 ?C ; (5) Minimum emissivity measurement range: 0.02 to 1.00 (single wafer); 0.02 to 0.98 (multi-wafer setup); (6) Optical fixed focus distance: somewhere between 10" to 20"; (7) Measurement spot diameter: somewhere between 0.2" and 1.0"; (8) Minimum data acquisition time (important for rotating disk reactors): 1 ms or faster; (9) Standard 1.33" conflat-flange viewport; (1 0) Operating conditions: 19 ?C to 27 ?C or broader temperature range; (11) Measurement reproducibility after connect/disconn ect of fiber-optic cable at 100% emissivity: less than 1 ?C; (12) Warm-up time: 1 hr or faster; (13) Dimensions: Electronics compatible with standard 19" rack-mount enclosure; (14) Fiber optic cable length: Minimum 10 feet; (15) Communication cable length: Minimum 10 feet; (16) Power requirements: 115 VAC or 220 VAC at 60 Hz and less than 5 amps; (17) Complete software control with capability to allow modification of input parameters for change in materials, systems, etc.; (18) Measurement accuracy and repeatability: Emissivity -- Repeatability: 0.3% or better; Drift (24 h): 0.4% or better; Temperature effect: 0.2%/?C or better; Accuracy: 1.3%; Temperature -- Accuracy @ 100% emissivity: 3 ?C (bare uncertainty); (19) Demonstrated ability to deliver such a device as evidenced by furnishing three (3) references to whom comparable systems have been sold over the past three (3) years, including reference POC, company, phone number, government contract/order number (if applicable); (20) Minimum 1-year warranty.*****Delivery is required within 2 months after receipt of order (ARO). The FOB point shall be DESTINATION, Gaithersburg, MD.*****Quotations will be evaluated in accordance with Federal Acquisition Regulation (FAR) Subpart 13.106-2-Evaluation of quotations or offers. Award will be made based on vendors' (A) Technical Capability to Meet Specifications (vendors shall address all specifications, and shall provide indication of understanding and ability to meet requirements); (B) Past Performance/Experience (vendors shall provide three (3) references to whom comparable items, for similar applications, have been sold over the past five (5) years, including organization name, point of contact, phone number, and fax number for each); and (C) Price. (A) and (B), when combined, are more important than (C).*****The Government anticipates awarding one purchase order resulting from this combined synopsis/solicitation to the responsible vendor whose quotation, conforming to this synopsis/solicitation, will offer the BEST VALUE to the Government, price and other factors considered.*****Vendors shall address all requirements in this combined synopsis/solicitation, and shall provide clear evidence of understanding and the ability and willingness to comply with the Government's specifications of need. Failure to address a specification/requirement will be construed by the Government as inability to meet the need, or the vendor's taking exception to it.*****All vendors shall provide the following: (A) One original and one copy of their quotation; (B) two copies of description and product literature, as applicable; (C) warranty information, and (D) a completed copy of provision 52.212-3, Offeror Representations and Certifications-Commercial Items, which may be downloaded from www.arnet.gov .*****The following Federal Acquisition Regulation (FAR) provision applies to this solicitation: 52.212-1, Instructions to Offerors-Commercial; ***** The clause at 52.212-4, Contract Terms and Conditions-Commercial Items, applies to this acquisition.*****The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including subparagraphs (11) 52.222-21, Prohibition of Segregated Facilities; (12) 52.222-26, Equal Opportunity; (13) 52.222-35, Affirmative Action for Disabled Veterans and Veterans of the Vietnam Era; (14) 52.222-36, Affirmative Action for Workers with Disabilities; (15) 52.222-37, Employment Reports on Disabled Veterans and Veterans of the Vietnam Era; (16) 52.222-19, Child Labor-Cooperation with Authorities and Remedies; (19)(ii) Alternate I of 52.225-3, Buy American Act-North American Free Trade Agreement-Israeli Trade Act-Balance of Payments Program; (21) 52.225-13, Restriction on Certain Foreign Purchases; (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration; and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded at http://oamweb.osec.doc.gov/conops/reflib/alp1296.htm The clause 52.211-6, Brand Name or Equal, applies to this acquisition.*****All interested, responsible vendors shall submit quotes, by 3:00 PM, Washington DC time, on DECEMBER 31, 2001, to the National Institute of Standards and Technology, Acquisition and Logistics Division, ATTN: TAMARA GRINSPON (01-844-3042), Building 301, Room B129, 100 Bureau Drive STOP 3571, Gaithersburg, Maryland 20899-3571. Faxed quotes will NOT be accepted. Copies of above-referenced clauses are available upon request.

Web Link

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Record

Loren Data Corp. 20011220/66SOL002.HTM (A-352 SN5154K1)