A -- RF MEMS IMPROVEMENT PROGRAM

Notice Date

December 21, 2001

Contracting Office

Department of the Air Force, Air Force Materiel Command, AFRL -- Wright Research Site, Det 1 AFRL/PK Bldg 167, Area B, 2310 8th Street, Wright-Patterson AFB, OH, 45433-7801

ZIP Code

45433-7801

Solicitation Number

PRDA-02-07-SNK

Response Due

February 15, 2002

Point of Contact

Susan Southers, Contract Negotiator, Phone (937) 656-9828, Email Susan.Southers@wpafb.af.mil -- Kevin Riley, Contracting Officer, Phone (937) 255-5762, Email kevin.riley@wpafb.af.mil

Description

DARPA and Air Force Research Laboratory, Sensor Directorate, RF Sensor Technology Division (AFRL/SNR) solicit research proposals for the RF MEMS IMPROVEMENT PROGRAM. DARPA and AFRL/SNRR are interested in developing revolutionary advances in technologies, designs, fabrication techniques, materials, and packaging concepts that can be applied to the large scale manufacture of RF Micro-Electro-Mechanical Switches (MEMS) and related components. The purpose of the RF MEMS Improvement Program is to develop and demonstrate technologies that will advance the current state-of-the-art of RF MEMS and increase the usefulness of these devices and related components for DoD applications. Proposals are being solicited that collectively encompass all of the areas described in this PRDA for a given type of RF MEMS switch. Successful achievement of required improvements of RF MEMS devices will only be achieved through a balanced and integrated effort in each area. Devices and components of interest include, but are not limited to: packaged RF MEMS as single switch devices; MEMS-based RF phase shifters, and switchable/tunable RF filters. (The resultant devices should have performance that exceeds that afforded by competitive solutions). Applications of RF MEMS devices and components include, but are not limited to: advanced radar sensors, advanced antennas and communications equipment. Offerors are free to submit proposals oriented toward capacitive switches, metal-to-metal contact switches or RF MEMS switches designed using another approach. However, because the technical issues are so different between capacitive, metal-to-metal and other switch approaches, offerors may submit separate proposals for each technology. This program is a two phase effort. Phase I will include development and demonstration of workable design and diagnostic tools, methodologies and capabilities leading to the ability to produce required RF MEMS components, at an affordable cost. Phase I will culminate, in a pilot (Final benchmark) run of at least 6 lots of functioning RF MEMS wafers (4 wafers/lot). From these lots, a sufficient number of devices will be selected randomly (i.e., from different lots, different wafers and different positions on the wafers) to constitute a sample size appropriate for a statistical analysis that will demonstrate goals for performance, yield, reliability and component lifetime have been achieved. A minimum of 100 devices will be selected and enclosed in suitable packages to carry out required tests and analysis of test results. Verification of all testing will be conducted by the government. Phase II will involve a full production run of at least 24 lots of functioning RF MEMS wafers (6 wafers/lot) and subsequent packaging, testing and evaluation of at least 200 functioning MEMS devices or components. Throughout this program, the Government will conduct independent testing and evaluation of the MEMS devices and components produced during this program. Offerors must be prepared to supply to the Government samples of the devices or test structures that are identical (i.e. from the same lot) to the ones they are using to assess process maturity, device reliability, RF performance, and/or failure mechanisms. The sample size shall be ten percent of the devices or structures being assessed by the offeror and shall be available for delivery (if requested) at the start of each of the offeror's test cycles. =20 Due to the complexity of the tasking and expertise required to perform these various activities, the government strongly encourages teaming for this effort. The offerors shall indicate experience in manufacture and test of MEMS switches (RF or DC); availability of manufacturing facilities, including the ability to control environment and access; availability of failure analysis tools such as SEM, Auger, AFM; microwave test equipment and adequate time guaranteed for the program use of the facilities and equipment described above. The Government may periodically hold workshops to stimulate the exchange of ideas that will advance the state-of-the-art of RF MEMS technology among the selected Offerors. These workshops shall form the basis of development of a set of standards for processing, handling, packaging, and material selection that will enhance the reliability of RF MEMS. Offerors will be asked to help in facilitating these workshops by actively participating and exchanging information at the workshops with the government and other Offerors. The current announcement is for Phase I proposals only. Phase II will be requested as set forth in the complete PRDA announcement; interested offerors may view and/or download the full PRDA solicitation by accessing the Federal Business Opportunities (FedBizOps) homepage at http://www.eps.gov/. Direct questions to the Contracting point of contact identified in the announcement.

Web Link

Visit this URL for the latest information about this (http://www.eps.gov/spg/USAF/AFMC/AFRLWRS/PRDA-02-07-SNK/listing.htm l)

Record

Loren Data Corp. 20011226/ASOL005.HTM (D-355 SN515854)